Category
Applied physics
Store
Wordery
Brand
Oup oxford
Plasma Etching : Oxford University Press : 9780198562870 : 019856287X : 28 May 1998 : This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.
192.5 GBP
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