Plasma Etching By M. Sugawara 9780198562870 (Hardback)

Category

Applied physics

Store

Wordery

Brand

Oup oxford

Plasma Etching : Oxford University Press : 9780198562870 : 019856287X : 28 May 1998 : This book focuses on the remarkable recent advances in understanding low pressure radio frequency glow discharges. It explains the basic analytical theory, plasma physics, and plasma diagnostics, before proceeding to the details of the etching process.

192.5 GBP