Emerging Technologies for In Situ Processing : Springer : 9789401071307 : 9401071306 : 26 Sep 2011 : 1. H. Ahmed In-Situ Processing Canbining MBE, Lit:hJgraphy and Ion-Implantation 2. 1. Hayashi M::>tivations and Early DenDnstrations for In-Situ Prcx::essings For III -V Semiconductor Devices 13 3. John J. Ritsko Laser Etchi. nJ and Microelectronic Applications 23 4. D. Bauerle, T. Szorenyi, G. Q. Zhang, K. Piglmayer, M. Eyett, R. Kullmer Laser-Induced O1emical Processing of Materials 33 5. E. L. Hu High Technology Manufacturing : Critical Issues for the Future 45 6. J. P. Harbison, P. F. Liao, D. M. Hwang, E. Kapon, M. C. Tamargo, G. E. Derkits Jr. and J. Levkoff U1 tra High Vacuum Processing : MBE 55 7. P. N. Favennec, H. L'Haridon, M. Salvi, L. Henry, A. Le Cerre, D. Lecrosnier, M. A. Di Forte Poisson, J. P. Duchemin Epitaxial Growth of III-V Materials on Implanted III-V Substrates 61 8. R. L. Jackson, T. T. Kodas, G. W. Tyndall, T. H. Baum and P. B. Canita Mechanisms of Laser-Induce